Total Solution
for CVD precursors
Due to the rapid growth of semiconductor industry
at Taiwan, the localization of its supporting industries has became
a future trend. Nanmat Technology Co., by introducing advanced purification
technology that developed by Chemat Electronic Materials Co., US,
is the first company to localize the CVD precursors and technology
at Taiwan to provide both Taiwan's and Asia's semiconductor market.
Base on the needs, the products that have been introduced include
:
| Products |
Description: |
 TEOS
|
For
SiO2 film deposition |
|
SiOF
Precursor, Smart-K 2.8 SOG,Smart-K 2.0 low K |
For
Low K Dielectric film |
|
TMB
/ TEB |
For
BPSG film deposition |
|
TAETO
/ TaCl5 /TMA/(Hf,Zr)Precursors |
For
High K film deposition |
|
TMPI
/TEPO /TMPO |
For
BPSG film deposition |
|
TDMAT
/ TDEAT / TBTDET/ TiCl4 / TBTDET / (Ta,Hf,Zr)
N Precursors |
For
diffusion barrier film deposition |
|
DMAH
/ Cu ( I ), Cu ( II ) Precursors |
For
metal layer film Deposition |
|
BST
/ PZT / PLEZ / Precursors Spin on (BT,BST,PEZ,PLEZ) |
For
Ferroelectric film |
|
Gas |
Silane,
BCl3 |
Many new CVD/ALD precursors are under development
and can be provided by customer request. In order for Taiwan's semiconductor
customers to compete with the worldwide competition, Nanmat Technology
Co. would like to provide service from every aspect as following :
1. Fast delivery :
By local supplying and just-in-time delivery, the investment for inventory
and containers by customers will be much lower.
2. Quality guarantee :
Fresh products with longer shelf life from Nanmat can eliminate the
concern of lead time and purity for imported products. Customer can
audit the production facility and quality control process easily to
have more confidence of the quality.
3. Excellent service :
Well-trained local technical people plus the assistance from US can
provide fast and excellent technical service, which will be much better
than the technical service provided by the sales agents and foreign
suppliers.
4. Full technical support :
Nanmat is continuely working with research institutes and companies
at Taiwan and worldwide, to develop new materials and chemicals for
next generation semiconductor processing. These new technologies will
be updated to the customers, to achieve a technical support from every
aspect.
5. Container recycling system :
Residue precursors in the containers will be collected and treated
by our recycling system, to eliminate the possible contamination of
environment totally.
|
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