Nanmat Technology Co., Ltd.- CVD/ALD (Chemical Vapr Deposition /Atomic Layr Depostion )

Taiwan‘s Largest CVD/ALD Precursors Manufacturer
One of the few high tech CVD/ALD advanced materials companies in the world with complete technical services from the front-end (synthesis/purification/analysis) process integration to the back-end (packaging/container manufacturing/valves overhaul).
Nanmat provides high quality chemical vapor deposition materials (CVD/ALD Precursors) for semiconductor customers, including the most advanced high k and low k dielectrics materials, and customizes synthesis, purification and packaging to improve process quality yields.

Canister Customized Design & Liquid level gauge

NANMAT provides customization of canister size and canister real-time liquid level detection (liquid level gauge). Has obtained the US and Taiwan’s patent.

Liquid Delivery System & Filter

To provide integrated and real-time technical services, NANMAT represents Wonik-IPS LDS (liquid delivery system), i-Chem T20 & i-Chem T-50, and MSP filters, VPG-A6 and VPG-A3.

Valve and Pipeline Cleaning Services

The Most Co$t-effective Solution

Based on professional and experiences, NANMAT has developed the solvent cleaning system in order to improve regular preventative maintenance (PM) efficiency of customer equipment, and provides valve and pipe cleaning services, which effectively reduces the cost of consumables (CoC) for customers.

CVD/ALD precursors
Canister Design
Precursor LDS & Filter
Valve and Pipeline Clean

Nanmat has been established in the Kaohsiung Nanzi Processing Zone since 1998 (currently renamed: Kaohsiung Nanzi Technology Industrial Park), and is a local company dedicated to the development of semiconductor CVD/ALD (Chemical Vapor Deposition /Atomic Layer Deposition) in Taiwan.

Professional research and manufacturing of various advanced CVD/ALD (Chemical Vapor Deposition /Atomic Layer Deposition) materials. It is one of the few in the world that can provide integration from the front end (synthesis, purification, analysis) process to the back end (filling, packaging, container manufacturing, and technology service) high tech advanced materials company.

After more than 20 years of research and innovation, the products have been recognized and adopted by international semiconductor manufacturing companies, and they have already occupied a considerable share of the semiconductor materials market by major international manufacturers. At present, the customer base has spanned across Asia and the Americas and gradually expanded to the global market. In order to integrate customer needs, Nanmat provides the following products and services

* CVD/ALD Precursors
* Liquid Delivery System
* Precursors's Filter
* Liquid Level Detecting System
* Customized service for material development and canister design
* Valve Cleaning and Reclamation

Application	Product　 NAME
Dielectrics PMD / IMD	• TEOS / TEPO / TMPO / TEB / TMB
Low K Dielectrics	• 4MS / OMCTS / DMDMOS
High K Dielectrics	• TAETO (Ta₂O₅ Precursor ) • TEMAH / HfCl₄ (ALD HfO₂ Precursor ) • TEMAZ (ALD ZrO₂ Precursor) • TMA (Al₂O₃ Precursor)
Metal Gate and Interconnect Metal	• TDMAT ( TiN Precursor ) • TiCl₄ ( Ti /TiN Precursor ) • PDMAT ( TaN Precursor) • CCTBA (Co Precursor ) • TMA ( Al Precursor )
Low-Temp Nitride / Oxide	• HCDS / 3DMAS / BTBAS
Dopants	• Trans DCE
SAM Coating	• FDTS / BTCSE / DI Water

Product Features

Products